Key structural and defect chemical aspects of Cd-In-Sn-O transparent conducting oxides

T. O. Mason*, D. R. Kammler, B. J. Ingram, G. B. Gonzalez, D. L. Young, T. J. Coutts

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

17 Scopus citations

Abstract

The equilibrium phase diagram (1175 °C in air), solubility ranges and room temperature physical properties (electrical, optical) were established for the various n-type transparent conductors in the CdO-In2O 3-SnO2 system. Extended solubility ranges were found to exist at constant Cd/Sn ratio for the bixbyite, spinel and orthorhombic perovskite phases. This is attributed to the isovalent and nearly size-matched nature of the co-substitution. Still larger solubility ranges were found for metastably-processed thin films. Co-doped bixyite and spinel phases were found to be inherently off-stoichiometric with respect to cation composition, leading to self-doped n-type character, in bulk and films. A correlation was found between optimized conductivity in the various phases and the density of octahedral Cd, In and/or Sn species in their crystal structures.

Original languageEnglish (US)
Pages (from-to)186-192
Number of pages7
JournalThin Solid Films
Volume445
Issue number2
DOIs
StatePublished - Dec 15 2003
EventProceedings of the 3rd International Symposium on Transparent Oxide - Tokyo, Japan
Duration: Apr 10 2003Apr 11 2003

Keywords

  • Bixbyite
  • Cd-In-Sn-O system
  • Perovskite
  • Spinel
  • Transparent conducting oxide (TCO)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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