Large-area nanoscale patterning: Chemistry meets fabrication

This Account describes a new paradigm for large-area nanoscale patterning that combines bottom-up and top-down approaches, merging chemistry with fabrication. This hybrid strategy uses simple nanofabrication techniques to control the alignment, size, shape, and periodicity of nanopatterns and chemical methods to control their materials properties and crystallinity. These tools are highly flexible and can create surface-patterned nanostructures with unusual properties and free-standing nanostructures that are multifunctional and monodisperse. The unprecedented scientific and technological opportunities enabled by nanoscale patterning over wafer-sized areas are discussed.