Large scale microdischarge arrays: Fabrication and characterization

S. J. Park; J. Chen; C. Liu; J. G. Eden

Large scale microdischarge arrays: Fabrication and characterization

S. J. Park^*, J. Chen, C. Liu, J. G. Eden

^*Corresponding author for this work

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Microdischarge devices and arrays having inverted square pyramidal cathodes were discussed. The integration of the new photonic devices into silicon has various applications including displays, chemical sensors and frequency standards. The results showed that the combination polymer/Si₃N₄/SiO₂ dielectric extends the device lifetime drastically with respect to employing only the polymer film as the dielectric.

Original language	English (US)
Title of host publication	Conference on Lasers and Electro-Optics, 2001. CLEO 01. Technical Digest
Pages	177-178
Number of pages	2
State	Published - Oct 8 2001
Event	Conference on Lasers and Electro-Optics (CLEO) - Baltimore, MD, United States Duration: May 6 2001 → May 11 2001

Other

Other	Conference on Lasers and Electro-Optics (CLEO)
Country	United States
City	Baltimore, MD
Period	5/6/01 → 5/11/01

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Large scale microdischarge arrays: Fabrication and characterization'. Together they form a unique fingerprint.

Cite this

@inproceedings{fc9d5064efa040aa9e6cd64f5410b9dc,

title = "Large scale microdischarge arrays: Fabrication and characterization",

abstract = "Microdischarge devices and arrays having inverted square pyramidal cathodes were discussed. The integration of the new photonic devices into silicon has various applications including displays, chemical sensors and frequency standards. The results showed that the combination polymer/Si3N4/SiO2 dielectric extends the device lifetime drastically with respect to employing only the polymer film as the dielectric.",

author = "Park, {S. J.} and J. Chen and C. Liu and Eden, {J. G.}",

year = "2001",

month = oct,

day = "8",

language = "English (US)",

pages = "177--178",

booktitle = "Conference on Lasers and Electro-Optics, 2001. CLEO 01. Technical Digest",

note = "Conference on Lasers and Electro-Optics (CLEO) ; Conference date: 06-05-2001 Through 11-05-2001",

}

TY - GEN

T1 - Large scale microdischarge arrays

T2 - Conference on Lasers and Electro-Optics (CLEO)

AU - Park, S. J.

AU - Chen, J.

AU - Liu, C.

AU - Eden, J. G.

PY - 2001/10/8

Y1 - 2001/10/8

N2 - Microdischarge devices and arrays having inverted square pyramidal cathodes were discussed. The integration of the new photonic devices into silicon has various applications including displays, chemical sensors and frequency standards. The results showed that the combination polymer/Si3N4/SiO2 dielectric extends the device lifetime drastically with respect to employing only the polymer film as the dielectric.

AB - Microdischarge devices and arrays having inverted square pyramidal cathodes were discussed. The integration of the new photonic devices into silicon has various applications including displays, chemical sensors and frequency standards. The results showed that the combination polymer/Si3N4/SiO2 dielectric extends the device lifetime drastically with respect to employing only the polymer film as the dielectric.

UR - http://www.scopus.com/inward/record.url?scp=0034810322&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034810322&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0034810322

SP - 177

EP - 178

BT - Conference on Lasers and Electro-Optics, 2001. CLEO 01. Technical Digest

Y2 - 6 May 2001 through 11 May 2001

ER -

Large scale microdischarge arrays: Fabrication and characterization

Abstract

Other

ASJC Scopus subject areas

Other files and links

Cite this