TY - JOUR
T1 - Laser induced interface reactions in Sb/Ge multilayer thin films
T2 - a study by RBS and CS-TEM
AU - Serna, R.
AU - Afonso, C. N.
AU - Catalina, F.
AU - Petford-Long, A. K.
AU - Teixeira, N.
AU - da Silva, M. F.
AU - Soares, J. C.
N1 - Funding Information:
This work was partially supported by PRONTIC (Spain). We want to thank the JNICT-CSIC and the British-Spanish Joint Research programmes for travelling finances.
PY - 1992/2/2
Y1 - 1992/2/2
N2 - Thin films consisting of alternate layers of Ge and Sb are laser irradiated by single nanosecond pulses from an excimer laser. RBS and CS-TEM are used to characterize the induced transformations upon irradiation. It is shown that the interdiffusion process occurs within the liquid phase and causes, by reactions at the first interface, the growth of a buried amorphous GeSb layer with a nonconstant stoichiometry. The high cooling rates (2 × 1010 K s-1) and liquid/solid interface velocities (0.8 ms-1) achieved during solidification, together with the absence of a crystalline nucleus at the interface to initiate crystallization, explain this behaviour.
AB - Thin films consisting of alternate layers of Ge and Sb are laser irradiated by single nanosecond pulses from an excimer laser. RBS and CS-TEM are used to characterize the induced transformations upon irradiation. It is shown that the interdiffusion process occurs within the liquid phase and causes, by reactions at the first interface, the growth of a buried amorphous GeSb layer with a nonconstant stoichiometry. The high cooling rates (2 × 1010 K s-1) and liquid/solid interface velocities (0.8 ms-1) achieved during solidification, together with the absence of a crystalline nucleus at the interface to initiate crystallization, explain this behaviour.
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U2 - 10.1016/0168-583X(92)95583-D
DO - 10.1016/0168-583X(92)95583-D
M3 - Article
AN - SCOPUS:25344442727
SN - 0168-583X
VL - 64
SP - 807
EP - 810
JO - Nuclear Inst. and Methods in Physics Research, B
JF - Nuclear Inst. and Methods in Physics Research, B
IS - 1-4
ER -