Lift-out procedures for atom probe tomography targeting nanoscale features in core-shell nanowire heterostructures

Sonal Padalkar, James R. Riley, Qiming Li, George T. Wang, Lincoln James Lauhon*

*Corresponding author for this work

Research output: Contribution to journalArticle

13 Scopus citations

Abstract

Focused ion beam (FIB) milling and lift-out was used to prepare atom probe tomography (APT) specimens from GaN-InGaN multi-quantum well (MQW) nanowire arrays. Modifications to the conventional FIB lift-out technique enable the site-specific analysis of different regions of a single nanowire heterostructure. Three dimensional (3-D) reconstructions of quantum wells generated by analysis along different directions with respect to the heterointerface demonstrate both the capabilities and limitations of atom probe tomographic analysis. The methods described herein can be applied to the site-specific analysis of other complex 3-D heterostructures.

Original languageEnglish (US)
Pages (from-to)656-661
Number of pages6
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Volume11
Issue number3-4
DOIs
StatePublished - Jan 1 2014

Keywords

  • Atom probe tomography
  • FIB
  • GaN
  • Micromanipulator
  • Nanowire

ASJC Scopus subject areas

  • Condensed Matter Physics

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