Line-focus acoustic microscopy measurements of acoustic properties of LiTaO3 crystal plates with an inversion layer

Ailie Tourlog*, Jan D. Achenbach, J. Kushibiki

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


Inversion layers of 2 μm and 30 μm thickness were formed at the negative dipole-end (-c) face of a Z-cut LiTaO3 crystal plate by proton exchange followed by heat treatment. The phase velocities of leaky surface acoustic waves (LSAWs) on both the positive (+c) and negative (-c) faces of the plate were measured by line-focus acoustic microscopy versus the angle of propagation, at a frequency of 225 MHz, and the results were compared with theoretical predictions. It is shown that for an inversion layer of 30 μm thickness the phase velocities of LSAWs on the +c and -c faces are the same, and almost equal to the velocities of the virgin plate. This suggests that the material constants, which are decreased due to the proton exchange, are restored to the original values by the heat treatment.

Original languageEnglish (US)
Pages (from-to)6616-6621
Number of pages6
JournalJournal of Applied Physics
Issue number10
StatePublished - May 15 1997

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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