Line-Focus Acoustic Microscopy Measurements of Nb2O5/MgO and BaTiO3/LaAlO3 Thin-Film/Substrate Configurations

Y. C. Lee, J. D. Achenbach, S. R. Gilbert, B. A. Block, B. W. Wessels, M. J. Nystrom

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

Line-focus acoustic microscopy has been used to measure the phase velocities of surface acoustic waves on bare MgO and bare LaAI03, and on Nb205/MgO and BaTi03/LaAI03 thin-film/substrate configurations. The thin films are polycrystalline materials. The substrates are anisotropic single-crystals. The measured angular variation of the surface acoustic wave velocities has been used to determine the elastic constants of MgO substrate and Nb205 thin-film. It has been assumed that the Nb205 films may be considered as essentially isotropic. The measurements for LaAI03 and BaTi03/LaAI03 show anomalies which are attributed to twinning in the LaAI03 substrate.

Original languageEnglish (US)
Pages (from-to)376-380
Number of pages5
JournalIEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Volume42
Issue number3
DOIs
StatePublished - May 1995

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

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