@article{9a9d724abe3b493e9b344831c8606053,
title = "Line focus acoustic microscopy to measure anisotropic acoustic properties of thin films",
abstract = "Propagation characteristics of surface acoustic waves on thin film coated elastic materials have been investigated by the use of an acoustic microscope with a line focus beam. Measurements were carried out for thin films of various thicknesses deposited on the (001) plane of cubic crystals. The phase velocities measured as functions of the angle of propagation display the anisotropy and confirm the advantage of directional measurement by the line focus acoustic microscope. Dispersion curves of surface waves propagating along the symmetry axes were obtained for various film thicknesses and frequencies. A systematic inversion of surface wave data based on a comparison of theoretical and experimental results has been used to obtain the thin film material constants.",
author = "Kim, {Jin O.} and Achenbach, {Jan D.}",
note = "Funding Information: The directional dependenceo f SAW velocitiesa nd the dispersiono f SAWS for bare and thin film coated anisotropicm aterialsh ave beeni nvestigatedb y the use of a line focus acousticm icroscopeM. easurementws ere carried out for thin films of various thicknessesd e-positedo n the (001) plane of cubic crystals.T he phase velocitiesm easureda s functions of the angleo f propagation displayt he expecteda nisotropya nd illustratet he advantageo f directionalm easuremenbty the line focus acousticm icroscope.T he dispersionc urves of surface wavesp ropagatinga long the symmetrya xes were ob-tainedb y measuringth e wave velocitiesf or variousf ilm The authorsa re pleasedt o acknowledget he help of Professor S. A. Barnett and Mr. P. B. Mirkarimi for providing us with TiN-deposited MgO specimensa, nd the courtesyo f Mr. R. D. Weglein for allowing us to use his diamond film coated silicon specimensT. he measurementwse rec arriedout with a line focus acoustic lens provided by Tohoku University through the courtesyo f ProfessorsN . Chubachi and J. Kushibiki. Helpful discussionsw ith Dr. J. Kushibiki are also gratefullya cknowledgedT. his work was carried out in the courseo f researchs ponsoredb y the Office of Naval Researchu nder Contract NOOO14-89-J-1362.",
year = "1992",
month = jun,
day = "30",
doi = "10.1016/0040-6090(92)90451-G",
language = "English (US)",
volume = "214",
pages = "25--34",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "1",
}