The article presents the application of linear field scanning force microscope to readout x ray Gabor holograms recorded in photoresist. The use of SFM can overcome the resolution limitation caused by aberrations from low magnification images of a commercial TEM.
|Original language||English (US)|
|Number of pages||2|
|Journal||Proceedings - Annual Meeting, Microscopy Society of America|
|State||Published - Dec 1 1993|
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