Linear-field scanning-force microscope: application to x-ray gabor holography

Steve Lindaas*, Chris Jacobsen, Malcolm Howells

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

The article presents the application of linear field scanning force microscope to readout x ray Gabor holograms recorded in photoresist. The use of SFM can overcome the resolution limitation caused by aberrations from low magnification images of a commercial TEM.

Original languageEnglish (US)
Pages (from-to)638-639
Number of pages2
JournalProceedings - Annual Meeting, Microscopy Society of America
StatePublished - Dec 1 1993

ASJC Scopus subject areas

  • Engineering(all)

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