Abstract
The article presents the application of linear field scanning force microscope to readout x ray Gabor holograms recorded in photoresist. The use of SFM can overcome the resolution limitation caused by aberrations from low magnification images of a commercial TEM.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 638-639 |
| Number of pages | 2 |
| Journal | Proceedings - Annual Meeting, Microscopy Society of America |
| State | Published - Dec 1 1993 |
ASJC Scopus subject areas
- Engineering(all)