Abstract
In this paper we discuss newly developed microfabrication methods for liquid crystal polymer (LCP). LCP is a thermoplastic polymer made of aligned molecule chains with crystal-like spatial regularity. It exhibits unique electrical, physical and chemical properties, making it suitable for certain MEMS applications. MEMS-compatible fabrication processes such as metallization, plasma bulk etching and thermal bonding have been developed in our work. We demonstrated two micro sensor applications involving the LCP material.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 628-633 |
| Number of pages | 6 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 13 |
| Issue number | 5 |
| DOIs | |
| State | Published - Sep 2003 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering