Liquid-Phase Beam Pen Lithography

Shu He, Zhuang Xie, Daniel J. Park, Xing Liao, Keith A. Brown, Peng Cheng Chen, Yu Zhou, George C. Schatz, Chad A. Mirkin*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

Beam pen lithography (BPL) in the liquid phase is evaluated. The effect of tip-substrate gap and aperture size on patterning performance is systematically investigated. As a proof-of-concept experiment, nanoarrays of nucleotides are synthesized using BPL in an organic medium, pointing toward the potential of using liquid phase BPL to perform localized photochemical reactions that require a liquid medium.

Original languageEnglish (US)
Pages (from-to)988-993
Number of pages6
JournalSmall
Volume12
Issue number8
DOIs
StatePublished - Feb 24 2016

Keywords

  • beam pen lithography
  • lithography
  • nucleotide nanoarrays
  • photochemistry
  • photolithography
  • scanning probe lithography

ASJC Scopus subject areas

  • Biotechnology
  • Biomaterials
  • Chemistry(all)
  • Materials Science(all)

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