Liquid source MOCVD of high quality YBa2Cu3O7-x films on polycrystalline and amorphous substrates

D. B. Studebaker*, G. Doubinina, J. Zhang, Y. Y. Wang, V. P. Dravid, T. J. Marks

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


High temperature superconducting YBa2Cu3O7-x films were grown by liquid delivery metal-organic chemical vapor deposition (LDMOCVD) on silver-coated stainless steel substrates. The films are c-axis oriented, and exhibit a very low surface resistance of 110 μΩ at 77 K and 3 GHz. A two-step LDMOCVD method for growth of oriented (200) CeO2 films on amorphous substrates was also developed. Films of CeO2 for YBCO buffer layers were grown on fused silica (SiO2), polycrystalline alumina (Al2O3), and sapphire (Al2O3). A highly c-axis oriented film of YBCO was grown on a fused silica substrate with a CeO2 buffer layer.

Original languageEnglish (US)
Pages (from-to)255-260
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
StatePublished - Jan 1 1996
EventProceedings of the 1995 MRS Fall Meeting - Boston, MA, USA
Duration: Nov 26 1995Dec 1 1995

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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