Original language | English |
---|---|
Title of host publication | Plasma/Surface Interactions and Materials Processing |
Editors | O. Auciello, A. Gras Marti, D.L. Flamm |
Publisher | NATO Advanced Study Institute |
State | Published - 1989 |
Low Energy Ion/Surface Interactions During Film Growth from the Vapor Phase: Effects on Nucleation and Growth Kinetics, Defect Structure, and Elemental Incorporation Probabilities
J.E. Greene, S.A. Barnett, J.E. Sundgren, A. Rockett
Research output: Chapter in Book/Report/Conference proceeding › Chapter