Low Energy Ion/Surface Interactions During Film Growth from the Vapor Phase: Effects on Nucleation and Growth Kinetics, Defect Structure, and Elemental Incorporation Probabilities

J.E. Greene, S.A. Barnett, J.E. Sundgren, A. Rockett

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationPlasma/Surface Interactions and Materials Processing
EditorsO. Auciello, A. Gras Marti, D.L. Flamm
PublisherNATO Advanced Study Institute
StatePublished - 1989

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