Low Energy Ion/Surface Interactions During Film Growth from the Vapor Phase: Effects on Nucleation and Growth Kinetics, Defect Structure, and Elemental Incorporation Probabilities

J.E. Greene; S.A. Barnett; J.E. Sundgren; A. Rockett

Low Energy Ion/Surface Interactions During Film Growth from the Vapor Phase: Effects on Nucleation and Growth Kinetics, Defect Structure, and Elemental Incorporation Probabilities

J.E. Greene, S.A. Barnett, J.E. Sundgren, A. Rockett

Materials Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English
Title of host publication	Plasma/Surface Interactions and Materials Processing
Editors	O. Auciello, A. Gras Marti, D.L. Flamm
Publisher	NATO Advanced Study Institute
State	Published - 1989

Cite this

Greene, J. E., Barnett, S. A., Sundgren, J. E., & Rockett, A. (1989). Low Energy Ion/Surface Interactions During Film Growth from the Vapor Phase: Effects on Nucleation and Growth Kinetics, Defect Structure, and Elemental Incorporation Probabilities. In O. Auciello, A. G. Marti, & D. L. Flamm (Eds.), Plasma/Surface Interactions and Materials Processing NATO Advanced Study Institute.

Greene, J.E. ; Barnett, S.A. ; Sundgren, J.E. et al. / Low Energy Ion/Surface Interactions During Film Growth from the Vapor Phase: Effects on Nucleation and Growth Kinetics, Defect Structure, and Elemental Incorporation Probabilities. Plasma/Surface Interactions and Materials Processing. editor / O. Auciello ; A. Gras Marti ; D.L. Flamm. NATO Advanced Study Institute, 1989.

@inbook{9ee4e0b17f1b428f9bc17cfb2bf1ea40,

title = "Low Energy Ion/Surface Interactions During Film Growth from the Vapor Phase: Effects on Nucleation and Growth Kinetics, Defect Structure, and Elemental Incorporation Probabilities",

author = "J.E. Greene and S.A. Barnett and J.E. Sundgren and A. Rockett",

year = "1989",

language = "English",

editor = "O. Auciello and Marti, {A. Gras} and D.L. Flamm",

booktitle = "Plasma/Surface Interactions and Materials Processing",

publisher = "NATO Advanced Study Institute",

}

Low Energy Ion/Surface Interactions During Film Growth from the Vapor Phase: Effects on Nucleation and Growth Kinetics, Defect Structure, and Elemental Incorporation Probabilities. / Greene, J.E.; Barnett, S.A.; Sundgren, J.E. et al.

Plasma/Surface Interactions and Materials Processing. ed. / O. Auciello; A. Gras Marti; D.L. Flamm. NATO Advanced Study Institute, 1989.

Research output: Chapter in Book/Report/Conference proceeding › Chapter

TY - CHAP

T1 - Low Energy Ion/Surface Interactions During Film Growth from the Vapor Phase: Effects on Nucleation and Growth Kinetics, Defect Structure, and Elemental Incorporation Probabilities

AU - Greene, J.E.

AU - Barnett, S.A.

AU - Sundgren, J.E.

AU - Rockett, A.

PY - 1989

Y1 - 1989

M3 - Chapter

BT - Plasma/Surface Interactions and Materials Processing

A2 - Auciello, O.

A2 - Marti, A. Gras

A2 - Flamm, D.L.

PB - NATO Advanced Study Institute

ER -