Low-loss and strongly confined InGaAsP/InP optical waveguide fabricated by benzocyclobutene wafer bonding

Yong Ma; Seoijin Park; Liwei Wang; Seng-Tiong Ho

Low-loss and strongly confined InGaAsP/InP optical waveguide fabricated by benzocyclobutene wafer bonding

Yong Ma^*, Seoijin Park, Liwei Wang, Seng-Tiong Ho

^*Corresponding author for this work

Electrical and Computer Engineering

Research output: Contribution to journal › Conference article › peer-review

4 Scopus citations

Abstract

The fabrication and loss measurements of benzocyclobutene (BCB), a relative class of organic polymers, bonded InGaAsP/InP optical waveguide with very strong two-dimensional confinement are investigated. The wafer structure for bonding is grown by MBE. On the (100) InP substrate, a very thin InGaAsP stop layer is grown, followed by a 2 μm InP buffer and 0.45 μm InGaAsP guiding layer, then a 0.4 μm InP as a cladding layer.

Original language	English (US)
Pages (from-to)	754-755
Number of pages	2
Journal	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume	2
State	Published - Dec 1 1999
Event	Proceedings of the 1999 12th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS'99) - San Francisco, CA, USA Duration: Nov 8 1999 → Nov 11 1999

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

@article{1dd9be7db9db497683ea31b8d4481844,

title = "Low-loss and strongly confined InGaAsP/InP optical waveguide fabricated by benzocyclobutene wafer bonding",

abstract = "The fabrication and loss measurements of benzocyclobutene (BCB), a relative class of organic polymers, bonded InGaAsP/InP optical waveguide with very strong two-dimensional confinement are investigated. The wafer structure for bonding is grown by MBE. On the (100) InP substrate, a very thin InGaAsP stop layer is grown, followed by a 2 μm InP buffer and 0.45 μm InGaAsP guiding layer, then a 0.4 μm InP as a cladding layer.",

author = "Yong Ma and Seoijin Park and Liwei Wang and Seng-Tiong Ho",

year = "1999",

month = dec,

day = "1",

language = "English (US)",

volume = "2",

pages = "754--755",

journal = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

issn = "1092-8081",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "Proceedings of the 1999 12th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS'99) ; Conference date: 08-11-1999 Through 11-11-1999",

}

TY - JOUR

T1 - Low-loss and strongly confined InGaAsP/InP optical waveguide fabricated by benzocyclobutene wafer bonding

AU - Ma, Yong

AU - Park, Seoijin

AU - Wang, Liwei

AU - Ho, Seng-Tiong

PY - 1999/12/1

Y1 - 1999/12/1

N2 - The fabrication and loss measurements of benzocyclobutene (BCB), a relative class of organic polymers, bonded InGaAsP/InP optical waveguide with very strong two-dimensional confinement are investigated. The wafer structure for bonding is grown by MBE. On the (100) InP substrate, a very thin InGaAsP stop layer is grown, followed by a 2 μm InP buffer and 0.45 μm InGaAsP guiding layer, then a 0.4 μm InP as a cladding layer.

AB - The fabrication and loss measurements of benzocyclobutene (BCB), a relative class of organic polymers, bonded InGaAsP/InP optical waveguide with very strong two-dimensional confinement are investigated. The wafer structure for bonding is grown by MBE. On the (100) InP substrate, a very thin InGaAsP stop layer is grown, followed by a 2 μm InP buffer and 0.45 μm InGaAsP guiding layer, then a 0.4 μm InP as a cladding layer.

UR - http://www.scopus.com/inward/record.url?scp=0033322775&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033322775&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0033322775

VL - 2

SP - 754

EP - 755

JO - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

JF - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

SN - 1092-8081

T2 - Proceedings of the 1999 12th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS'99)

Y2 - 8 November 1999 through 11 November 1999

ER -

Low-loss and strongly confined InGaAsP/InP optical waveguide fabricated by benzocyclobutene wafer bonding

Abstract

ASJC Scopus subject areas

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