Low-loss and strongly confined InGaAsP/InP optical waveguide fabricated by benzocyclobutene wafer bonding

Yong Ma*, Seoijin Park, Liwei Wang, Seng-Tiong Ho

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations

Abstract

The fabrication and loss measurements of benzocyclobutene (BCB), a relative class of organic polymers, bonded InGaAsP/InP optical waveguide with very strong two-dimensional confinement are investigated. The wafer structure for bonding is grown by MBE. On the (100) InP substrate, a very thin InGaAsP stop layer is grown, followed by a 2 μm InP buffer and 0.45 μm InGaAsP guiding layer, then a 0.4 μm InP as a cladding layer.

Original languageEnglish (US)
Pages (from-to)754-755
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume2
StatePublished - Dec 1 1999
EventProceedings of the 1999 12th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS'99) - San Francisco, CA, USA
Duration: Nov 8 1999Nov 11 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Low-loss and strongly confined InGaAsP/InP optical waveguide fabricated by benzocyclobutene wafer bonding'. Together they form a unique fingerprint.

Cite this