Low-temperature ABC-type atomic layer deposition: synthesis of highly uniform ultrafine supported metal nanoparticles

Junling Lu, Peter C. Stair

Research output: Contribution to journalArticlepeer-review

84 Scopus citations

Abstract

[Figure Presented] Sheltered growth: A novel atomic layer deposition (ALD) method to synthesize highly uniform ultrafine supported metal nanoparticles is described. The ALD process includes growing protected metal nanoparticles and new support layers simultaneously at low temperature. In the final stage, the activation of the metal nanoparticles can be achieved by removing the protective ligands through calcination or reduction at elevated temperature (see picture).

Original languageEnglish (US)
Pages (from-to)2547-2551
Number of pages5
JournalAngewandte Chemie - International Edition
Volume49
Issue number14
DOIs
StatePublished - Mar 29 2010

Keywords

  • Atomic layer deposition
  • Low-temperature techniques
  • Metal nanoparticles
  • Palladium
  • Supported catalysts

ASJC Scopus subject areas

  • General Chemistry
  • Catalysis

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