Low-temperature magnetron sputter-deposition, hardness, and electrical resistivity of amorphous and crystalline alumina thin films

Quan Li, Yuan Hsin Yu, C. Singh Bhatia, L. D. Marks, S. C. Lee, Y. W. Chung

Research output: Contribution to journalConference articlepeer-review

79 Scopus citations

Fingerprint

Dive into the research topics of 'Low-temperature magnetron sputter-deposition, hardness, and electrical resistivity of amorphous and crystalline alumina thin films'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy