Maglev 6-DOF stage for nanopositioning

Won Jong Kim*, Shobhit Verma, Jie Gu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


This paper presents a novel magnetically levitated (maglev) stage with nanoscale positioning capability in all six degrees of freedom (DOFs). The key aspect of this device is that its single moving part has no mechanical contact with its stationary base, which leads to no mechanical friction and stiction, and no wear particle generation. We present herein the mechanical design, instrumentation, and test results of this maglev stage. Currently it shows position resolution of 4 nm, position noise of 2 nm rms, hundreds-of-micrometer translational travel range, a-few-milliradian rotational travel range, and power consumption less than a fraction of a Watt per axis. This maglev stage can be used in numerous applications such as manufacture of nanoscale structures, assembly and packaging on micro-size parts, vibration isolation for delicate instrumentation, and telepresence microsurgery.

Original languageEnglish (US)
Title of host publicationProceedings of the ASME Dynamic Systems and Control Division - 2003
PublisherAmerican Society of Mechanical Engineers (ASME)
Number of pages8
StatePublished - Jan 1 2003
Event2003 ASME International Mechanical Engineering Congress - Washington, DC, United States
Duration: Nov 15 2003Nov 21 2003


Other2003 ASME International Mechanical Engineering Congress
Country/TerritoryUnited States
CityWashington, DC


  • Magnetic levitation
  • Nanomanipulation
  • Nanopositioning
  • Precision position control

ASJC Scopus subject areas

  • Mechanical Engineering
  • Software


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