TY - GEN
T1 - Maglev linear actuator for nanopositioning
AU - Kim, Won Jong
AU - Maheshwari, Himanshu
AU - Gu, Jie
PY - 2002
Y1 - 2002
N2 - Manufacture of nanoscale structures and atomic-level manipulation is an emerging technology field in the 21st century [1,2]. This paper presents a novel magnetically levitated instrument capable of six-degrees-of-freedom (6-DOF) motion with a single moving part. The applications, where this generic positioning device can be used, are manufacturing of nanoscale structures, assembly and packaging of microparts, vibration isolation for delicate instrumentation and motion/force feedback in telepresence surgery. The key element of this stage is a linear actuator capable of providing forces in both suspension and translation without contact. The total range of motion for the linear actuator is ±250 μm. In this paper, we present the closed-loop control test results and stochastic noise/disturbance analysis and prediction for the linear actuator.
AB - Manufacture of nanoscale structures and atomic-level manipulation is an emerging technology field in the 21st century [1,2]. This paper presents a novel magnetically levitated instrument capable of six-degrees-of-freedom (6-DOF) motion with a single moving part. The applications, where this generic positioning device can be used, are manufacturing of nanoscale structures, assembly and packaging of microparts, vibration isolation for delicate instrumentation and motion/force feedback in telepresence surgery. The key element of this stage is a linear actuator capable of providing forces in both suspension and translation without contact. The total range of motion for the linear actuator is ±250 μm. In this paper, we present the closed-loop control test results and stochastic noise/disturbance analysis and prediction for the linear actuator.
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U2 - 10.1115/IMECE2002-33395
DO - 10.1115/IMECE2002-33395
M3 - Conference contribution
AN - SCOPUS:78249240636
SN - 0791836428
SN - 9780791836422
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings
SP - 377
EP - 381
BT - Microelectromechanical Systems
PB - American Society of Mechanical Engineers (ASME)
ER -