Maglev linear actuator for nanopositioning

Won Jong Kim*, Himanshu Maheshwari, Jie Gu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


Manufacture of nanoscale structures and atomic-level manipulation is an emerging technology field in the 21st century [1,2]. This paper presents a novel magnetically levitated instrument capable of six-degrees-of-freedom (6-DOF) motion with a single moving part. The applications, where this generic positioning device can be used, are manufacturing of nanoscale structures, assembly and packaging of microparts, vibration isolation for delicate instrumentation and motion/force feedback in telepresence surgery. The key element of this stage is a linear actuator capable of providing forces in both suspension and translation without contact. The total range of motion for the linear actuator is ±250 μm. In this paper, we present the closed-loop control test results and stochastic noise/disturbance analysis and prediction for the linear actuator.

Original languageEnglish (US)
Title of host publicationMicroelectromechanical Systems
PublisherAmerican Society of Mechanical Engineers (ASME)
Number of pages5
ISBN (Print)0791836428, 9780791836422
StatePublished - 2002

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings

ASJC Scopus subject areas

  • Mechanical Engineering


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