Magnetic actuation of hinged microstructures

Yong W. Yi; Chang Liu

doi:10.1109/84.749397

Magnetic actuation of hinged microstructures

Yong W. Yi^*, Chang Liu

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

104 Scopus citations

Abstract

We have investigated magnetic actuation of hinged, surface micromachined structures. Electroplated magnetic material (Permalloy) is integrated with two types of hinged microstructures and the magnetic actuation process has been experimentally characterized. Under a given external magnetic field, the angular displacement of a hinged structure is determined by the volume of the magnetic material or by the stiffness of an auxiliary flexural loading spring. We have demonstrated parallel actuation of large arrays of hinged microstructures under a global (wafer scale) external magnetic field. The design rules for achieving a prescribed asynchronous actuation sequence among a group of microstructures have been determined to enable efficient parallel assembly of three-dimensional (3-D) microstructures.

Original language	English (US)
Pages (from-to)	10-17
Number of pages	8
Journal	Journal of Microelectromechanical Systems
Volume	8
Issue number	1
DOIs	https://doi.org/10.1109/84.749397
State	Published - Mar 1999

Keywords

Hinged microstructures
Magnetic actuation
Parallel assembly

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/84.749397

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@article{084f8a6e1b104ce4a8d56eb02bc3f94c,

title = "Magnetic actuation of hinged microstructures",

abstract = "We have investigated magnetic actuation of hinged, surface micromachined structures. Electroplated magnetic material (Permalloy) is integrated with two types of hinged microstructures and the magnetic actuation process has been experimentally characterized. Under a given external magnetic field, the angular displacement of a hinged structure is determined by the volume of the magnetic material or by the stiffness of an auxiliary flexural loading spring. We have demonstrated parallel actuation of large arrays of hinged microstructures under a global (wafer scale) external magnetic field. The design rules for achieving a prescribed asynchronous actuation sequence among a group of microstructures have been determined to enable efficient parallel assembly of three-dimensional (3-D) microstructures.",

keywords = "Hinged microstructures, Magnetic actuation, Parallel assembly",

author = "Yi, {Yong W.} and Chang Liu",

year = "1999",

month = mar,

doi = "10.1109/84.749397",

language = "English (US)",

volume = "8",

pages = "10--17",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "1",

}

TY - JOUR

T1 - Magnetic actuation of hinged microstructures

AU - Yi, Yong W.

AU - Liu, Chang

PY - 1999/3

Y1 - 1999/3

N2 - We have investigated magnetic actuation of hinged, surface micromachined structures. Electroplated magnetic material (Permalloy) is integrated with two types of hinged microstructures and the magnetic actuation process has been experimentally characterized. Under a given external magnetic field, the angular displacement of a hinged structure is determined by the volume of the magnetic material or by the stiffness of an auxiliary flexural loading spring. We have demonstrated parallel actuation of large arrays of hinged microstructures under a global (wafer scale) external magnetic field. The design rules for achieving a prescribed asynchronous actuation sequence among a group of microstructures have been determined to enable efficient parallel assembly of three-dimensional (3-D) microstructures.

AB - We have investigated magnetic actuation of hinged, surface micromachined structures. Electroplated magnetic material (Permalloy) is integrated with two types of hinged microstructures and the magnetic actuation process has been experimentally characterized. Under a given external magnetic field, the angular displacement of a hinged structure is determined by the volume of the magnetic material or by the stiffness of an auxiliary flexural loading spring. We have demonstrated parallel actuation of large arrays of hinged microstructures under a global (wafer scale) external magnetic field. The design rules for achieving a prescribed asynchronous actuation sequence among a group of microstructures have been determined to enable efficient parallel assembly of three-dimensional (3-D) microstructures.

KW - Hinged microstructures

KW - Magnetic actuation

KW - Parallel assembly

UR - http://www.scopus.com/inward/record.url?scp=0033100849&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033100849&partnerID=8YFLogxK

U2 - 10.1109/84.749397

DO - 10.1109/84.749397

M3 - Article

AN - SCOPUS:0033100849

SN - 1057-7157

VL - 8

SP - 10

EP - 17

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 1

ER -

Magnetic actuation of hinged microstructures

Abstract

Keywords

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