TY - JOUR
T1 - Marked Cofuel Tuning of Combustion Synthesis Pathways for Metal Oxide Semiconductor Films
AU - Wang, Binghao
AU - Leonardi, Matthew J.
AU - Huang, Wei
AU - Chen, Yao
AU - Zeng, Li
AU - Eckstein, Brian J.
AU - Marks, Tobin J.
AU - Facchetti, Antonio
N1 - Funding Information:
The authors thank AFOSR (FA9550-18-1-0320), the Northwestern U. MRSEC (NSF DMR-1720139), and Flexterra Inc. for support of this research. This work made use of the Northwestern University Micro/Nano Fabrication Facility (NUFAB), J. B. Cohen X-Ray Diffraction Facility, EPIC facility, Keck-II facility, and SPID facility of the NUANCE Center at Northwestern U., which received support from the Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF NNCI-1542205); the MRSEC program (NSF DMR-1720139) at the Materials Research Center; the International Institute for Nanotechnology (IIN); the Keck Foundation; and the State of Illinois, through the IIN.
Publisher Copyright:
© 2019 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
PY - 2019/10/1
Y1 - 2019/10/1
N2 - Thin-film combustion synthesis (CS), driven by the exothermic reaction of liquid fuel+oxidizer+metal precursors is an important methodology for growing smooth, transparent, amorphous, and polycrystalline metal oxide (MO) films at low temperatures. In optimized MO CS precursors, the fuel combines a primary coordinating ligand [e.g., acetylacetone (AcAcH)] with an additional cofuel. Several studies suggest a structure–property relationship between the resulting MO film composition/microstructure and macroscopic charge transport characteristics. However, the structural and compositional details of solution-phase precursors remain poorly defined. Here a diverse series of cofuels (urea, glycine, sorbitol, L-ascorbic acid) are selected and mechanistic details of the fuel-assisted CS process are provided, focusing on technologically relevant indium gallium zinc oxide (IGZO). Thermal analysis, proton nuclear magnetic resonance, mass spectrometry, and X-ray diffraction are used to probe how the cofuel affects AcAcH-metal ion binding and how it influences the MO precursor response. The charge transport characteristics of cofuel-derived IGZO films stimulate additional cofuel studies and the results support the primary cofuel role of enhancing CS heat generation, hence IGZO film microstructure densification and carrier mobility. These results provide new insight into precursor design and its relationship to thin-film CS processes, yielding guidance for more efficient, environmentally benign (co)fuels for high-performance solution-processed MO electronics.
AB - Thin-film combustion synthesis (CS), driven by the exothermic reaction of liquid fuel+oxidizer+metal precursors is an important methodology for growing smooth, transparent, amorphous, and polycrystalline metal oxide (MO) films at low temperatures. In optimized MO CS precursors, the fuel combines a primary coordinating ligand [e.g., acetylacetone (AcAcH)] with an additional cofuel. Several studies suggest a structure–property relationship between the resulting MO film composition/microstructure and macroscopic charge transport characteristics. However, the structural and compositional details of solution-phase precursors remain poorly defined. Here a diverse series of cofuels (urea, glycine, sorbitol, L-ascorbic acid) are selected and mechanistic details of the fuel-assisted CS process are provided, focusing on technologically relevant indium gallium zinc oxide (IGZO). Thermal analysis, proton nuclear magnetic resonance, mass spectrometry, and X-ray diffraction are used to probe how the cofuel affects AcAcH-metal ion binding and how it influences the MO precursor response. The charge transport characteristics of cofuel-derived IGZO films stimulate additional cofuel studies and the results support the primary cofuel role of enhancing CS heat generation, hence IGZO film microstructure densification and carrier mobility. These results provide new insight into precursor design and its relationship to thin-film CS processes, yielding guidance for more efficient, environmentally benign (co)fuels for high-performance solution-processed MO electronics.
KW - electron mobility
KW - mass spectroscopy
KW - precursor coordination chemistry
KW - redox reaction
KW - thermal analysis
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U2 - 10.1002/aelm.201900540
DO - 10.1002/aelm.201900540
M3 - Article
AN - SCOPUS:85069931615
SN - 2199-160X
VL - 5
JO - Advanced Electronic Materials
JF - Advanced Electronic Materials
IS - 10
M1 - 1900540
ER -