Abstract
In this paper, we describe the design, fabrication, and testing of monolithically micromachined silicon probes for scanning probe microscope (SPM) applications. An SPM probe consists of three parts: an atomically sharp tip, a supporting flexural beam, and a handle. Unique design and fabrication processes allow probes with uniform geometry to be developed efficiently. The process is robust, as no time-critical steps are involved. Tips are formed by anisotropic etching followed by oxidation sharpening. Monolithic process enhances reliability of the probe by eliminting post-fabrication assembly steps such as wafer bonding. We have demonstrated SPM probes with excellent mechanical characteristics, including high resonant frequency and zero intrinsic bending.
Original language | English (US) |
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Pages (from-to) | 233-237 |
Number of pages | 5 |
Journal | Sensors and Actuators, A: Physical |
Volume | 71 |
Issue number | 3 |
DOIs | |
State | Published - Dec 1 1998 |
Keywords
- Monolithic silicon probes
- Oxidation sharpening
- Scanning probe microscope
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering