MASSIVELY PARALLEL LITHOGRAPHY WITH TWO-DIMENSIONAL PEN ARRAYS

@misc{b5642e332ffc4fb2a5fc875e8d13fcb4,

title = "MASSIVELY PARALLEL LITHOGRAPHY WITH TWO-DIMENSIONAL PEN ARRAYS",

author = "Chad Mirkin",

note = "filingdate: 2007-3-23 issueddate: 2012-7-17 Status: published attorneydocketnumber: 2006-054-07; 8220317",

year = "2008",

month = may,

day = "8",

language = "English",

type = "Patent",

}

Research output: Patent

TY - PAT

T1 - MASSIVELY PARALLEL LITHOGRAPHY WITH TWO-DIMENSIONAL PEN ARRAYS

AU - Mirkin, Chad

N1 - filingdate: 2007-3-23 issueddate: 2012-7-17 Status: published attorneydocketnumber: 2006-054-07

PY - 2008/5/8

Y1 - 2008/5/8

M3 - Patent

M1 - 8220317

ER -

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