Materials for Superconducting Electronics: In Situ Growth of Prgao3Thin Films by Metalorganic Chemical Vapor Deposition

Bin Han, Deborah A. Neumayer, Douglas L. Schulz, Bruce J. Hinds, Tobin J. Marks

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


Phase-pure thin films of the YBCO, BSCCO, TBCCO lattice-matched and low dielectric-loss perovskite insulator PrGaO3 have been grown in situ on single-crystal (110) LaA1O3, (001) SrTiG3, and (001) MgO substrates by metalorganic chemical vapor deposition (MOCVD). Films were grown at temperatures between 750 and 800 °C using the volatile metaiorganic /?-diketonate precursors M(dpm)3 (M = Pr, Ga, and dpm = dipivaloylmethanate) As assessed by x-ray diffraction, the films grow epitaxially on LaAlQ3 and SrTiO3 substrates with a high degree of (001) and/or (110) plane orientation parallel to the substrate surface. The films grown on MgO substrates are polycrystalline. Scanning electron microscopy reveals that the MOCVD-derived PrGaO3 films have smooth, featureless surfaces on all three kinds of substrates.

Original languageEnglish (US)
Pages (from-to)1431-1434
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number4
StatePublished - Jul 1993

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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