Measurement of thermophysical properties of hydrogenated amorphous carbon thin films using picosecond thermoreflectance technique

H. A. Alwi*, Y. Y. Kim, R. Awang, S. A. Rahman, S. Krishnaswamy

*Corresponding author for this work

Research output: Contribution to journalArticle

7 Scopus citations

Abstract

The thermophysical properties of hydrogenated amorphous carbon (a-C:H) thin films, namely the thermal diffusivity α, thermal effusivity É, thermal conductivity κ and volumetric heat capacity Cf have been measured simultaneously using ultrafast optical pump-probe technique. The pump-probe method utilizes the film surface temperature decay following a heating pulse from a pump laser. From the temperature decay, the thermal diffusivity α and effusivity É were obtained by curve-fittings of two different physical models. The thermal conductivity κ and volumetric heat capacity Cf were then deduced from the measured α and É using the relations κ = α1/2É and C f = É/α1/2. The thermal conductivity and volumetric heat capacity obtained compare favorably with those reported in the literatures. The method is independent of substrate and Al capping layers. The curve-fittings are simpler because independent of parameters of the films and the Kapitza boundary thermal resistance at Al/a-C:H interface.

Original languageEnglish (US)
Pages (from-to)199-203
Number of pages5
JournalInternational Journal of Heat and Mass Transfer
Volume63
DOIs
StatePublished - May 7 2013

Keywords

  • Amorphous hydrogenated carbon
  • Picosecond thermoreflectance technique
  • Thermal conductivity
  • Thermal diffusivity
  • Thermal effusivity
  • Volumetric heat capacity

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

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