Measurements of thickness, surface roughness and corrosion performance of 1-10 NM thick CNx films

Dejun Li, Yanfeng Chen, Yip Wah Chung*

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

Abstract

Nitrogenated carbon (CNx) films were synthesized by using pulsed dc magnetron sputtering. When grown with substrate tilt of 45° and rotation speed of 20-25 rpm, the rootmean-square surface roughness is ∼0.3 nm when sampled over 20×20 μm2 areas, increasing to ∼0.4 nm when sampled over ∼0.05×3 cm2 using x-ray reflectivity measurements. X-ray reflectivity measurements showed that the mass density of these CNx films is ∼2.0 gm/cc, independent of film thickness from ∼1 to 10 nm, consistent with ion beam analysis. CNx films deposited with substrate tilt of 45° and rotation speed of 20-25 rpm have about 1/3 fewer corrosion spots per unit area than those without. Reducing CNx thickness from 3 to 1 nm results in marked increase in corrosion currents.

Original languageEnglish (US)
Pages99-102
Number of pages4
DOIs
StatePublished - 2003
EventSTLE/ASME Joint International Tribology Conference and Exhibition - Ponte Vedra Beach, FL, United States
Duration: Oct 27 2003Oct 29 2003

Other

OtherSTLE/ASME Joint International Tribology Conference and Exhibition
CountryUnited States
CityPonte Vedra Beach, FL
Period10/27/0310/29/03

ASJC Scopus subject areas

  • Engineering(all)

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