Measurements of thickness, surface roughness and corrosion performance of 1-10 NM thick CN x films

Dejun Li, Yanfeng Chen, Yip-Wah Chung*

*Corresponding author for this work

Research output: Contribution to conferencePaper

Abstract

Nitrogenated carbon (CN x) films were synthesized by using pulsed dc magnetron sputtering. When grown with substrate tilt of 45° and rotation speed of 20-25 rpm, the rootmean-square surface roughness is ∼0.3 nm when sampled over 20×20 μm 2 areas, increasing to ∼0.4 nm when sampled over ∼0.05×3 cm 2 using x-ray reflectivity measurements. X-ray reflectivity measurements showed that the mass density of these CN x films is ∼2.0 gm/cc, independent of film thickness from ∼1 to 10 nm, consistent with ion beam analysis. CN x films deposited with substrate tilt of 45° and rotation speed of 20-25 rpm have about 1/3 fewer corrosion spots per unit area than those without. Reducing CN x thickness from 3 to 1 nm results in marked increase in corrosion currents.

Original languageEnglish (US)
Pages99-102
Number of pages4
StatePublished - Dec 1 2003
EventSTLE/ASME Joint International Tribology Conference and Exhibition - Ponte Vedra Beach, FL, United States
Duration: Oct 27 2003Oct 29 2003

Other

OtherSTLE/ASME Joint International Tribology Conference and Exhibition
CountryUnited States
CityPonte Vedra Beach, FL
Period10/27/0310/29/03

Fingerprint

Surface roughness
Corrosion
X rays
Substrates
Magnetron sputtering
Ion beams
Film thickness
Carbon

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Li, D., Chen, Y., & Chung, Y-W. (2003). Measurements of thickness, surface roughness and corrosion performance of 1-10 NM thick CN x films. 99-102. Paper presented at STLE/ASME Joint International Tribology Conference and Exhibition, Ponte Vedra Beach, FL, United States.
Li, Dejun ; Chen, Yanfeng ; Chung, Yip-Wah. / Measurements of thickness, surface roughness and corrosion performance of 1-10 NM thick CN x films. Paper presented at STLE/ASME Joint International Tribology Conference and Exhibition, Ponte Vedra Beach, FL, United States.4 p.
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Li, D, Chen, Y & Chung, Y-W 2003, 'Measurements of thickness, surface roughness and corrosion performance of 1-10 NM thick CN x films' Paper presented at STLE/ASME Joint International Tribology Conference and Exhibition, Ponte Vedra Beach, FL, United States, 10/27/03 - 10/29/03, pp. 99-102.

Measurements of thickness, surface roughness and corrosion performance of 1-10 NM thick CN x films. / Li, Dejun; Chen, Yanfeng; Chung, Yip-Wah.

2003. 99-102 Paper presented at STLE/ASME Joint International Tribology Conference and Exhibition, Ponte Vedra Beach, FL, United States.

Research output: Contribution to conferencePaper

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AB - Nitrogenated carbon (CN x) films were synthesized by using pulsed dc magnetron sputtering. When grown with substrate tilt of 45° and rotation speed of 20-25 rpm, the rootmean-square surface roughness is ∼0.3 nm when sampled over 20×20 μm 2 areas, increasing to ∼0.4 nm when sampled over ∼0.05×3 cm 2 using x-ray reflectivity measurements. X-ray reflectivity measurements showed that the mass density of these CN x films is ∼2.0 gm/cc, independent of film thickness from ∼1 to 10 nm, consistent with ion beam analysis. CN x films deposited with substrate tilt of 45° and rotation speed of 20-25 rpm have about 1/3 fewer corrosion spots per unit area than those without. Reducing CN x thickness from 3 to 1 nm results in marked increase in corrosion currents.

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Li D, Chen Y, Chung Y-W. Measurements of thickness, surface roughness and corrosion performance of 1-10 NM thick CN x films. 2003. Paper presented at STLE/ASME Joint International Tribology Conference and Exhibition, Ponte Vedra Beach, FL, United States.