TY - JOUR
T1 - Mechanical assembly of complex, 3D mesostructures from releasable multilayers of advanced materials
AU - Yan, Zheng
AU - Zhang, Fan
AU - Liu, Fei
AU - Han, Mengdi
AU - Ou, Dapeng
AU - Liu, Yuhao
AU - Lin, Qing
AU - Guo, Xuelin
AU - Fu, Haoran
AU - Xie, Zhaoqian
AU - Gao, Mingye
AU - Huang, Yuming
AU - Kim, Jung Hwan
AU - Qiu, Yitao
AU - Nan, Kewang
AU - Kim, Jeonghyun
AU - Gutruf, Philipp
AU - Luo, Hongying
AU - Zhao, An
AU - Hwang, Keh Chih
AU - Huang, Yonggang
AU - Zhang, Yihui
AU - Rogers, John A.
N1 - Funding Information:
We thank J. Wang for technical support. Fabrication and measurements of microscale 3D structures were carried out at the Frederick Seitz Materials Research Laboratory, University of Illinois. Fabrication and measurements of millimeter-scale 3D structures were carried out at the Applied Mechanics Laboratory, Tsinghua University. J.A.R. and colleagues at the University of Illinois acknowledge the support from the U.S. Department of Energy, Office of Science, Basic Energy Sciences (award no. DE-FG02-07ER46471) for all of the work on materials, microfabrication, and assembly. Y.Z. acknowledges the support from the National Natural Science Foundation of China (grant nos. 11502129 and 11672152) and the Thousand Young Talents Program of China. Y.H. acknowledges the support from the NSF (grant no. CMMI-1400169) and the NIH (grant no. R01EB019337). K.-C.H. acknowledges the support from the National Basic Research Program of China (grant no. 2015CB351900).
Publisher Copyright:
© 2016 The Authors.
PY - 2016/9
Y1 - 2016/9
N2 - Capabilities for assembly of three-dimensional (3D) micro/nanostructures in advanced materials have important implications across a broad range of application areas, reaching nearly every class of microsystem technology. Approaches that rely on the controlled, compressive buckling of 2D precursors are promising because of their demonstrated compatibility with the most sophisticated planar technologies, where materials include inorganic semiconductors, polymers, metals, and various heterogeneous combinations, spanning length scales from submicrometer to centimeter dimensions. We introduce a set of fabrication techniques and design concepts that bypass certain constraints set by the underlying physics and geometrical properties of the assembly processes associated with the original versions of these methods. In particular, the use of releasable, multilayer 2D precursors provides access to complex 3D topologies, including dense architectures with nested layouts, controlled points of entanglement, and other previously unobtainable layouts. Furthermore, the simultaneous, coordinated assembly of additional structures can enhance the structural stability and drive the motion of extended features in these systems. The resulting 3D mesostructures, demonstrated in a diverse set of more than 40 different examples with feature sizes from micrometers to centimeters, offer unique possibilities in device design. A 3D spiral inductor for near-field communication represents an example where these ideas enable enhanced quality (Q) factors and broader working angles compared to those of conventional 2D counterparts.
AB - Capabilities for assembly of three-dimensional (3D) micro/nanostructures in advanced materials have important implications across a broad range of application areas, reaching nearly every class of microsystem technology. Approaches that rely on the controlled, compressive buckling of 2D precursors are promising because of their demonstrated compatibility with the most sophisticated planar technologies, where materials include inorganic semiconductors, polymers, metals, and various heterogeneous combinations, spanning length scales from submicrometer to centimeter dimensions. We introduce a set of fabrication techniques and design concepts that bypass certain constraints set by the underlying physics and geometrical properties of the assembly processes associated with the original versions of these methods. In particular, the use of releasable, multilayer 2D precursors provides access to complex 3D topologies, including dense architectures with nested layouts, controlled points of entanglement, and other previously unobtainable layouts. Furthermore, the simultaneous, coordinated assembly of additional structures can enhance the structural stability and drive the motion of extended features in these systems. The resulting 3D mesostructures, demonstrated in a diverse set of more than 40 different examples with feature sizes from micrometers to centimeters, offer unique possibilities in device design. A 3D spiral inductor for near-field communication represents an example where these ideas enable enhanced quality (Q) factors and broader working angles compared to those of conventional 2D counterparts.
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U2 - 10.1126/sciadv.1601014
DO - 10.1126/sciadv.1601014
M3 - Article
C2 - 27679820
AN - SCOPUS:85034717141
SN - 2375-2548
VL - 2
JO - Science Advances
JF - Science Advances
IS - 9
M1 - e1601014
ER -