Abstract
A review on the mechanical characterization of materials at small length scale is presented. The focus is on the different micro- and nanoscale testing techniques, the variety of materials investigated by the scientific and industrial communities and the mechanical quantities identified by such methodologies.
Original language | English (US) |
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Pages (from-to) | 545-561 |
Number of pages | 17 |
Journal | Journal of Mechanical Science and Technology |
Volume | 26 |
Issue number | 2 |
DOIs | |
State | Published - Feb 2012 |
Keywords
- MEMS
- Mechanical characterization
- Mechanical properties
- NEMS
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering