@inproceedings{77c0d24372554481ba3343680070f51c,
title = "Mechanical design of a sample manipulator for X-Ray coherent surface scattering imaging with flexure stages for 10-NM-SCale and 10-Nrad-scale positioning",
author = "Deming Shu and Steven Kearney and Jayson Anton and Zhang Jiang and Tao Sun and Jorg Maser and Sandy, {Alec R.} and Jin Wang",
year = "2016",
language = "English (US)",
series = "Proceedings - ASPE 2016 Annual Meeting",
publisher = "American Society for Precision Engineering, ASPE",
pages = "26--29",
booktitle = "Proceedings - ASPE 2016 Annual Meeting",
note = "31st Annual Meeting of the American Society for Precision Engineering, ASPE 2016 ; Conference date: 23-10-2016 Through 28-10-2016",
}