Mechanical properties of ultrananocrystalline diamond thin films for MEMS applications

H. D. Espinosa*, B. Peng, K. H. Kim, B. C. Prorok, N. Moldovan, X. C. Xiao, J. E. Gerbi, J. Birrell, O. Auciello, J. A. Carlisle, D. M. Gruen, D. C. Mancini

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

Abstract

Microcantilever deflection and the membrane deflection experiment (MDE) were used to examine the elastic and fracture properties of ultrananocrystalline diamond (UNCD) thin films in relation to their application to microelectromechanical systems (MEMS). Freestanding microcantilevers and membranes were fabricated using standard MEMS fabrication techniques adapted to our UNCD film technology. Elastic moduli measured by both methods described above are in agreement, with the values being in the range 930 and 970 GPa with both techniques showing good reproducibility. The MDE test showed fracture strength to vary from 3.95 to 5.03 GPa when seeding was performed with ultrasonic agitation of nanosized particles.

Original languageEnglish (US)
Pages (from-to)213-218
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume741
DOIs
StatePublished - 2002
EventNano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines - Boston, MA, United States
Duration: Dec 2 2002Dec 4 2002

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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