Mechanical properties of ultrananocrystalline diamond thin films relevant to MEMS/NEMS devices

H. D. Espinosa*, B. C. Prorok, B. Peng, K. H. Kim, N. Moldovan, O. Auciello, J. A. Carlisle, D. M. Gruen, D. C. Mancini

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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