Abstract
Electronic systems that offer elastic mechanical responses to high strain deformation are of growing interest due to their ability to enable new applications whose requirements are impossible to satisfy with conventional wafer-based technologies. This article reviews the mechanics of stretchable inorganic materials on compliant substrates. Specifically, three forms of stretchable structures are reviewed. The first one is stretchable ribbon, which provides one-dimensional stretchability. The second is stretchable nanomembranes, which can be stretched in all directions. The last is a noncoplanar mesh design, which has the advantage of providing large stretchability up to and exceeding 100%. Mechanics models and their comparison to experiment are reviewed for these three cases. Such models provide design guidelines for stretchable electronics.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1107-1125 |
| Number of pages | 19 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 27 |
| Issue number | 5 |
| DOIs | |
| State | Published - 2009 |
Funding
The authors thank T. Banks for various helps in processing by use of facilities at Frederick Seitz Materials Research Laboratory. This material is based on work supported by the National Science Foundation under Grant No. ECCS-0824129, NSFC, and the U.S. Department of Energy, Division of Materials Sciences under Award No. DE-FG02-07ER46471 through the Materials Research Laboratory and Center for Microanalysis of Materials (Grant No. DE-FG02-07ER46453) at the University of Illinois at Urbana-Champaign. One of the authors (J.S.) acknowledges the financial support from the College of Engineering at the University of Miami.
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films