MEMS arrayed scanning probes for soft nanolithography

S. Li; C. Liu

doi:10.1149/1.2357285

MEMS arrayed scanning probes for soft nanolithography

S. Li^*, C. Liu

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

In the past several years, much progresses have been made in the area of scanning probe based, parallel soft nano lithography for patterning biomolecule directly with nano-meter resolution and high degree of registration accuracy. We report the development and demonstration of arrayed soft nanolithography probes for dip pen nanolithography (DPN), scanning probe contact printing (SPCP), and multifunctional scanning probe nanolithography. The probes have been used for high throughput direct write of thiol molecules. copyright The Electrochemical Society.

Original language	English (US)
Pages (from-to)	463-472
Number of pages	10
Journal	ECS Transactions
Volume	3
Issue number	10
DOIs	https://doi.org/10.1149/1.2357285
State	Published - Dec 1 2006
Event	Chemical Sensors 7 -and- MEMS/NEMS 7 - 210th Electrochemical Society Meeting - Cancun, Mexico Duration: Oct 29 2006 → Nov 3 2006

ASJC Scopus subject areas

Engineering(all)

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10.1149/1.2357285

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title = "MEMS arrayed scanning probes for soft nanolithography",

abstract = "In the past several years, much progresses have been made in the area of scanning probe based, parallel soft nano lithography for patterning biomolecule directly with nano-meter resolution and high degree of registration accuracy. We report the development and demonstration of arrayed soft nanolithography probes for dip pen nanolithography (DPN), scanning probe contact printing (SPCP), and multifunctional scanning probe nanolithography. The probes have been used for high throughput direct write of thiol molecules. copyright The Electrochemical Society.",

author = "S. Li and C. Liu",

year = "2006",

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AB - In the past several years, much progresses have been made in the area of scanning probe based, parallel soft nano lithography for patterning biomolecule directly with nano-meter resolution and high degree of registration accuracy. We report the development and demonstration of arrayed soft nanolithography probes for dip pen nanolithography (DPN), scanning probe contact printing (SPCP), and multifunctional scanning probe nanolithography. The probes have been used for high throughput direct write of thiol molecules. copyright The Electrochemical Society.

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MEMS arrayed scanning probes for soft nanolithography

Abstract

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