MEMS arrayed scanning probes for soft nanolithography

S. Li*, C. Liu

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


In the past several years, much progresses have been made in the area of scanning probe based, parallel soft nano lithography for patterning biomolecule directly with nano-meter resolution and high degree of registration accuracy. We report the development and demonstration of arrayed soft nanolithography probes for dip pen nanolithography (DPN), scanning probe contact printing (SPCP), and multifunctional scanning probe nanolithography. The probes have been used for high throughput direct write of thiol molecules. copyright The Electrochemical Society.

Original languageEnglish (US)
Pages (from-to)463-472
Number of pages10
JournalECS Transactions
Issue number10
StatePublished - Dec 1 2006
EventChemical Sensors 7 -and- MEMS/NEMS 7 - 210th Electrochemical Society Meeting - Cancun, Mexico
Duration: Oct 29 2006Nov 3 2006

ASJC Scopus subject areas

  • Engineering(all)


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