MEMS-based shear stress sensors

Chang Liu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In this paper I will present an overview of work in the area of MEMS based flow sensors and shear stress sensors. Micromachining technology provides the advantage of low cost, high integration density sensors for air and underwater applications. Both flow rate sensors and shear stress sensors have been made based on various principles including momentum transfer and heat transfer. In order to realize large-scale application of MEMS flow sensors, solutions for low cost, high yield packaging of sensors must be developed.

Original languageEnglish (US)
Title of host publicationProceedings of the 2001 ASME Fluids Engineering Division Summer Meeting. Volume 1
Subtitle of host publicationForums
EditorsT.J. O Hern, T.J. O Hern
Number of pages6
StatePublished - 2003
Event2001 ASME Fluids Engineering Division Summer Meeting - New Orleans, LA, United States
Duration: May 29 2001Jun 1 2001

Publication series

NameProceedings of the ASME Fluids Engineering Division Summer Meeting


Other2001 ASME Fluids Engineering Division Summer Meeting
Country/TerritoryUnited States
CityNew Orleans, LA

ASJC Scopus subject areas

  • Mechanical Engineering
  • Fluid Flow and Transfer Processes


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