TY - GEN
T1 - MEMS-based shear stress sensors
AU - Liu, Chang
PY - 2003
Y1 - 2003
N2 - In this paper I will present an overview of work in the area of MEMS based flow sensors and shear stress sensors. Micromachining technology provides the advantage of low cost, high integration density sensors for air and underwater applications. Both flow rate sensors and shear stress sensors have been made based on various principles including momentum transfer and heat transfer. In order to realize large-scale application of MEMS flow sensors, solutions for low cost, high yield packaging of sensors must be developed.
AB - In this paper I will present an overview of work in the area of MEMS based flow sensors and shear stress sensors. Micromachining technology provides the advantage of low cost, high integration density sensors for air and underwater applications. Both flow rate sensors and shear stress sensors have been made based on various principles including momentum transfer and heat transfer. In order to realize large-scale application of MEMS flow sensors, solutions for low cost, high yield packaging of sensors must be developed.
UR - http://www.scopus.com/inward/record.url?scp=0346325860&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0346325860&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0346325860
SN - 0791835324
SN - 9780791835326
T3 - Proceedings of the ASME Fluids Engineering Division Summer Meeting
SP - 757
EP - 762
BT - Proceedings of the 2001 ASME Fluids Engineering Division Summer Meeting. Volume 1
A2 - O Hern, T.J.
A2 - O Hern, T.J.
T2 - 2001 ASME Fluids Engineering Division Summer Meeting
Y2 - 29 May 2001 through 1 June 2001
ER -