Metal-organic chemical vapor deposition of ferroelectric oxide thin films for electronic and optical applications

Bruce W Wessels*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

67 Scopus citations

Abstract

Thin films of ferroelectric oxides, particularly BaTiO3 and its solid state solution with SrTiO3, hold the possiblity of use in microelectronic, electrooptic, and nonlinear optic applications. Many of these applications require thin films that are textured or epitaxial. Synthesis of these ferroelectrics has centered on physical vapor deposition techniques such as magnetron sputtering, molecular beam epitaxy, laser ablation, and activated reactive evaporation. An alternative, powerful approach is metal-organic chemical vapor deposition (MOCVD). This deposition method has produced films of BaTiO3 with ferroelectric, electro-optic, and nonlinear optical properties approaching that of bulk.

Original languageEnglish (US)
Pages (from-to)525-546
Number of pages22
JournalAnnual Review of Materials Science
Volume25
Issue number1
DOIs
StatePublished - Jan 1 1995

Keywords

  • Barium strontium titanate
  • Dielectrics
  • Epitaxy
  • Ferroelectrics

ASJC Scopus subject areas

  • Materials Science(all)

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