Metalorganic chemical vapor deposition of monocrystalline GaN thin films on β-LiGaO2 substrates

P. Kung*, A. Saxler, X. Zhang, D. Walker, R. Lavado, M. Razeghi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

73 Scopus citations

Abstract

We report the metalorganic chemical vapor deposition growth and characterization of monocrystalline GaN thin films on β-LiGaO2 substrates. The influence of the growth temperature on the crystal quality was studied. The structural, electrical, and optical properties of the films were assessed through scanning electron microscopy, x-ray diffraction, Hall measurements, optical transmission, photoluminescence.

Original languageEnglish (US)
Pages (from-to)2116-2118
Number of pages3
JournalApplied Physics Letters
Volume69
Issue number14
DOIs
StatePublished - Sep 30 1996

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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