Methacrylate-based polymer films useful in lithographic applications exhibit different glass transition temperature-confinement effects at high and low molecular weight

Tian Lan, John M. Torkelson*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

45 Scopus citations

Fingerprint

Dive into the research topics of 'Methacrylate-based polymer films useful in lithographic applications exhibit different glass transition temperature-confinement effects at high and low molecular weight'. Together they form a unique fingerprint.

INIS

Material Science