The synthesis of ultrathin nitrogenated carbon (CNx) films was discussed. The pulsed dc magnetron sputtering was used for the synthesis. The influence of substrate tilt angle and rotation speed on surface roughness was also explored.
|Original language||English (US)|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|State||Published - Sep 2003|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films