Metrology of 1-10 nm thick CNx films: Thickness, density, and surface roughness measurements

Dejun Li*, Yanfeng Chen, Yip-Wah Chung, Fernando Lazaro Freire

*Corresponding author for this work

Research output: Contribution to journalArticle

12 Scopus citations

Abstract

The synthesis of ultrathin nitrogenated carbon (CNx) films was discussed. The pulsed dc magnetron sputtering was used for the synthesis. The influence of substrate tilt angle and rotation speed on surface roughness was also explored.

Original languageEnglish (US)
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume21
Issue number5
DOIs
StatePublished - Sep 1 2003

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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