Micro magnetic silicone elastomer membrane actuator

Melvin Khoo; Chang Liu

doi:10.1016/S0924-4247(00)00559-8

Micro magnetic silicone elastomer membrane actuator

Melvin Khoo, Chang Liu^*

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

185 Scopus citations

Abstract

We present results of the design, fabrication, and testing of a microfabricated, membrane-type magnetic actuator. Magnetic pieces made of electroplated Permalloy (Ni₈₀Fe₂₀) are embedded in a thin flexible membrane made of silicone elastomer. When an external magnetic field is applied, a torque generated on the magnetic pieces produces membrane displacement. Permalloy pieces that are 100-μm-wide, 870-μ-long, and 22-μ-thick are strategically positioned in a 2-mm-square, 40-μ-thick polydimethylsiloxane (PDMS) membrane (Sylgard 184). This design, produced through numerical simulations, is optimized to realize large membrane displacements. Tests performed on this membrane actuator showed displacements >80 μm in the presence of a 2.85 × 10⁵ A/m external magnetic field. Larger displacements are possible with greater magnetization fields. This type of membrane actuator can be applied to the fabrication of tetherless micropumps for use in microfluidic systems.

Original language	English (US)
Pages (from-to)	259-266
Number of pages	8
Journal	Sensors and Actuators, A: Physical
Volume	89
Issue number	3
DOIs	https://doi.org/10.1016/S0924-4247(00)00559-8
State	Published - Apr 15 2001

Keywords

Magnetic actuation
Membrane
Microactuator
Permalloy
Silicone rubber

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/S0924-4247(00)00559-8

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title = "Micro magnetic silicone elastomer membrane actuator",

abstract = "We present results of the design, fabrication, and testing of a microfabricated, membrane-type magnetic actuator. Magnetic pieces made of electroplated Permalloy (Ni80Fe20) are embedded in a thin flexible membrane made of silicone elastomer. When an external magnetic field is applied, a torque generated on the magnetic pieces produces membrane displacement. Permalloy pieces that are 100-μm-wide, 870-μ-long, and 22-μ-thick are strategically positioned in a 2-mm-square, 40-μ-thick polydimethylsiloxane (PDMS) membrane (Sylgard 184). This design, produced through numerical simulations, is optimized to realize large membrane displacements. Tests performed on this membrane actuator showed displacements >80 μm in the presence of a 2.85 × 105 A/m external magnetic field. Larger displacements are possible with greater magnetization fields. This type of membrane actuator can be applied to the fabrication of tetherless micropumps for use in microfluidic systems.",

keywords = "Magnetic actuation, Membrane, Microactuator, Permalloy, Silicone rubber",

author = "Melvin Khoo and Chang Liu",

note = "Funding Information: This work is supported by DARPA Composite CAD program under contract number F 30602-98-2-0178. ",

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doi = "10.1016/S0924-4247(00)00559-8",

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T1 - Micro magnetic silicone elastomer membrane actuator

AU - Khoo, Melvin

AU - Liu, Chang

N1 - Funding Information: This work is supported by DARPA Composite CAD program under contract number F 30602-98-2-0178.

PY - 2001/4/15

Y1 - 2001/4/15

N2 - We present results of the design, fabrication, and testing of a microfabricated, membrane-type magnetic actuator. Magnetic pieces made of electroplated Permalloy (Ni80Fe20) are embedded in a thin flexible membrane made of silicone elastomer. When an external magnetic field is applied, a torque generated on the magnetic pieces produces membrane displacement. Permalloy pieces that are 100-μm-wide, 870-μ-long, and 22-μ-thick are strategically positioned in a 2-mm-square, 40-μ-thick polydimethylsiloxane (PDMS) membrane (Sylgard 184). This design, produced through numerical simulations, is optimized to realize large membrane displacements. Tests performed on this membrane actuator showed displacements >80 μm in the presence of a 2.85 × 105 A/m external magnetic field. Larger displacements are possible with greater magnetization fields. This type of membrane actuator can be applied to the fabrication of tetherless micropumps for use in microfluidic systems.

AB - We present results of the design, fabrication, and testing of a microfabricated, membrane-type magnetic actuator. Magnetic pieces made of electroplated Permalloy (Ni80Fe20) are embedded in a thin flexible membrane made of silicone elastomer. When an external magnetic field is applied, a torque generated on the magnetic pieces produces membrane displacement. Permalloy pieces that are 100-μm-wide, 870-μ-long, and 22-μ-thick are strategically positioned in a 2-mm-square, 40-μ-thick polydimethylsiloxane (PDMS) membrane (Sylgard 184). This design, produced through numerical simulations, is optimized to realize large membrane displacements. Tests performed on this membrane actuator showed displacements >80 μm in the presence of a 2.85 × 105 A/m external magnetic field. Larger displacements are possible with greater magnetization fields. This type of membrane actuator can be applied to the fabrication of tetherless micropumps for use in microfluidic systems.

KW - Magnetic actuation

KW - Membrane

KW - Microactuator

KW - Permalloy

KW - Silicone rubber

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Micro magnetic silicone elastomer membrane actuator

Abstract

Keywords

ASJC Scopus subject areas

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