Micro-Raman measurements of bending stresses in micromachined silicon flexures

Keyphrases

• Raman Measurements 100%
• Micromachining 100%
• Bending Stress 100%
• Silicon Flexures 100%
• Micro-Raman 100%
• Spatial Resolution 50%
• Raman Spectroscopy 50%
• Finite Element Model 50%
• Micron-scale 50%
• Mechanical Stress 50%
• Microsystems 50%
• Etched Silicon 50%
• Reactive Ions 50%
• Micromachined Devices 50%
• Scale Characterization 50%

Engineering

• Flexure 100%
• Bending Stress 100%
• Microsystem 50%
• Micromachined Device 50%
• Mechanical Stress 50%
• Finite Element Modeling 50%
• Spatial Resolution 50%

Material Science

• Silicon 100%
• Raman Spectroscopy 50%
• Mechanical Stress 50%
• Finite Element Modeling 50%