Micro-stereolithography for MEMS

X. Zhang*, X. N. Jiang, C. Sun

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

19 Scopus citations

Abstract

Micro stereolithography (μSL) is a novel micro-manufacturing process which builds the truly 3D microstructures by solidifying the liquid monomer in a layer by layer fashion. In this work, an advanced micro stereolithography (μSL) apparatus is designed and developed which includes an Ar+ laser, the beam delivery system, computer-controlled precision x-y-z stages and CAD design tool, and in situ process monitoring systems. The 1.2 μm resolution of μSL fabrication has been achieved with this apparatus. The micro tubes with high aspect ratio of 16 and real 3D microchannels and micro cones are fabricated on silicon substrate. For the first time, micro stereolithography of ceramic micro gears has been successfully demonstrated.

Original languageEnglish (US)
Title of host publicationMicro-Electro-Mechanical Systems (MEMS)
EditorsR.J. Furness
PublisherASME
Pages3-9
Number of pages7
Volume66
StatePublished - Dec 1 1998
EventProceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition - Anaheim, CA, USA
Duration: Nov 15 1998Nov 20 1998

Other

OtherProceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition
CityAnaheim, CA, USA
Period11/15/9811/20/98

ASJC Scopus subject areas

  • Software
  • Mechanical Engineering

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