Micro-stereolithography of polymeric and ceramic microstructures

X. Zhang*, X. N. Jiang, C. Sun

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

354 Scopus citations

Abstract

Micro-stereolithography (μSL) is a novel micro-manufacturing process which builds the truly 3D microstructures by solidifying the liquid monomer in a layer by layer fashion. In this work, an advanced μSL apparatus is designed and developed which includes an Ar+ laser, the beam delivery system, computer-controlled precision x-y-z stages and CAD design tool, and in situ process monitoring systems. The 1.2 μm resolution of μSL fabrication has been achieved with this apparatus. The microtubes with high aspect ratio of 16 and real 3D microchannels and microcones are fabricated on silicon substrate. For the first time, μSL of ceramic microgears has been successfully demonstrated.

Original languageEnglish (US)
Pages (from-to)149-156
Number of pages8
JournalSensors and Actuators, A: Physical
Volume77
Issue number2
DOIs
StatePublished - Oct 12 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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