Micro-stereolithography of polymeric and ceramic microstructures

X. Zhang; X. N. Jiang; C. Sun

doi:10.1016/S0924-4247(99)00189-2

Micro-stereolithography of polymeric and ceramic microstructures

X. Zhang^*, X. N. Jiang, C. Sun

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

391 Scopus citations

Abstract

Micro-stereolithography (μSL) is a novel micro-manufacturing process which builds the truly 3D microstructures by solidifying the liquid monomer in a layer by layer fashion. In this work, an advanced μSL apparatus is designed and developed which includes an Ar⁺ laser, the beam delivery system, computer-controlled precision x-y-z stages and CAD design tool, and in situ process monitoring systems. The 1.2 μm resolution of μSL fabrication has been achieved with this apparatus. The microtubes with high aspect ratio of 16 and real 3D microchannels and microcones are fabricated on silicon substrate. For the first time, μSL of ceramic microgears has been successfully demonstrated.

Original language	English (US)
Pages (from-to)	149-156
Number of pages	8
Journal	Sensors and Actuators, A: Physical
Volume	77
Issue number	2
DOIs	https://doi.org/10.1016/S0924-4247(99)00189-2
State	Published - Oct 12 1999

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/S0924-4247(99)00189-2

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abstract = "Micro-stereolithography (μSL) is a novel micro-manufacturing process which builds the truly 3D microstructures by solidifying the liquid monomer in a layer by layer fashion. In this work, an advanced μSL apparatus is designed and developed which includes an Ar+ laser, the beam delivery system, computer-controlled precision x-y-z stages and CAD design tool, and in situ process monitoring systems. The 1.2 μm resolution of μSL fabrication has been achieved with this apparatus. The microtubes with high aspect ratio of 16 and real 3D microchannels and microcones are fabricated on silicon substrate. For the first time, μSL of ceramic microgears has been successfully demonstrated.",

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N2 - Micro-stereolithography (μSL) is a novel micro-manufacturing process which builds the truly 3D microstructures by solidifying the liquid monomer in a layer by layer fashion. In this work, an advanced μSL apparatus is designed and developed which includes an Ar+ laser, the beam delivery system, computer-controlled precision x-y-z stages and CAD design tool, and in situ process monitoring systems. The 1.2 μm resolution of μSL fabrication has been achieved with this apparatus. The microtubes with high aspect ratio of 16 and real 3D microchannels and microcones are fabricated on silicon substrate. For the first time, μSL of ceramic microgears has been successfully demonstrated.

AB - Micro-stereolithography (μSL) is a novel micro-manufacturing process which builds the truly 3D microstructures by solidifying the liquid monomer in a layer by layer fashion. In this work, an advanced μSL apparatus is designed and developed which includes an Ar+ laser, the beam delivery system, computer-controlled precision x-y-z stages and CAD design tool, and in situ process monitoring systems. The 1.2 μm resolution of μSL fabrication has been achieved with this apparatus. The microtubes with high aspect ratio of 16 and real 3D microchannels and microcones are fabricated on silicon substrate. For the first time, μSL of ceramic microgears has been successfully demonstrated.

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Micro-stereolithography of polymeric and ceramic microstructures

Abstract

ASJC Scopus subject areas

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