Micro thermal shear stress sensor with and without cavity underneath

Keyphrases

• Shear Stress Sensor 100%
• Silicon Nitride Film 100%
• Microthermal 100%
• High Sensitivity 50%
• Silicon Substrate 50%
• Sensor Structure 50%
• Response Sensitivity 50%
• Thin-film Silicon 50%
• Polysilicon 50%
• Cut-off Frequency 50%
• Heat Loss 50%
• Surface Micromachining 50%
• Film Substrate 50%
• Low-frequency Response 50%
• Sensor Element 50%
• Vacuum Chamber 50%
• Constant Temperature Mode 50%
• Micromachining Technology 50%
• Sacrificial Layer 50%
• IC Technology 50%
• Hot-film 50%
• Silicon Strip 50%
• Vertical Structure 50%

Engineering

• Nitride 100%
• Silicon Substrate 50%
• Heat Losses 50%
• Surface Micro-Machining 50%
• Cutoff Frequency 50%
• Constant Temperature 50%
• Frequency Response 50%

Material Science

• Film 100%
• Silicon Nitride 66%
• Silicon 66%
• Micromachining 33%
• Surface (Surface Science) 33%