Microcantilever array with embedded metal oxide semiconductor field effect transistor actuators for deflection control, deflection sensing, and high frequency oscillation

Stanley S. Chou, Yun Young Kim, Arvind Srivastava, Benjamin Murphy, Oluwaseyi Balogun, Soo Hyun Tark, Gajendra Shekhawat, Vinayak P. Dravid

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

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Engineering

Material Science