Microdischarge arrays: A new family of photonic devices (revised)

Sung Jin Park, Jack Chen, Clark J. Wagner, Nels P. Ostrom, Chang Liu, J. Gary Eden*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

45 Scopus citations

Abstract

The optical and electrical characteristics of microdischarge devices and arrays fabricated in semiconductors and metal/polymer structures are described. Devices as small as (10 μm) 2 in emitting area (nanoliters in volume) and arrays as large as 30 × 30 have been demonstrated and operated at gas pressures up to and exceeding one atmosphere. This new generation of microoptical sources is capable of producing photons from the infrared to the vacuum ultraviolet and beyond and is well suited for integration with microoptoelectronic, fluidic, and mechanical systems.

Original languageEnglish (US)
Pages (from-to)387-394
Number of pages8
JournalIEEE Journal on Selected Topics in Quantum Electronics
Volume8
Issue number2
DOIs
StatePublished - Mar 2002

Keywords

  • Discharges
  • Displays
  • Optical device integration
  • Optoelectronic devices

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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