Microdischarge devices on the 10 ∼ 30 μm scale: Fabrication and applications

Sung Jin Park*, Jack Chen, Chang Liu, J. Gary Eden

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Microdischarge device structures were designed to obtain cavity dimensions down to 10 μm. Microdrilling was performed through a metal/polymer/metal thin layered structure. Microelectromechanical system techniques were used for design and fabrication of microdischarge devices with a cavity width in 10 ∼ 50 μm diameter. The total emission from the cavity was measured to be 4.7 μW in a solid angle of 5 × 10-2.

Original languageEnglish (US)
Title of host publicationPacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Number of pages1
StatePublished - Jan 1 2002
EventConference on Lasers and Electro-Optics (CLEO 2002) - Long Beach, CA, United States
Duration: May 19 2002May 24 2002

Other

OtherConference on Lasers and Electro-Optics (CLEO 2002)
CountryUnited States
CityLong Beach, CA
Period5/19/025/24/02

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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