Microdischarge devices on the 10 ∼ 30 μm scale: Fabrication and applications

Sung Jin Park; Jack Chen; Chang Liu; J. Gary Eden

Microdischarge devices on the 10 ∼ 30 μm scale: Fabrication and applications

Sung Jin Park^*, Jack Chen, Chang Liu, J. Gary Eden

^*Corresponding author for this work

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Microdischarge device structures were designed to obtain cavity dimensions down to 10 μm. Microdrilling was performed through a metal/polymer/metal thin layered structure. Microelectromechanical system techniques were used for design and fabrication of microdischarge devices with a cavity width in 10 ∼ 50 μm diameter. The total emission from the cavity was measured to be 4.7 μW in a solid angle of 5 × 10^-2.

Original language	English (US)
Title of host publication	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Number of pages	1
State	Published - Jan 1 2002
Event	Conference on Lasers and Electro-Optics (CLEO 2002) - Long Beach, CA, United States Duration: May 19 2002 → May 24 2002

Other

Other	Conference on Lasers and Electro-Optics (CLEO 2002)
Country/Territory	United States
City	Long Beach, CA
Period	5/19/02 → 5/24/02

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Cite this

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title = "Microdischarge devices on the 10 ∼ 30 μm scale: Fabrication and applications",

abstract = "Microdischarge device structures were designed to obtain cavity dimensions down to 10 μm. Microdrilling was performed through a metal/polymer/metal thin layered structure. Microelectromechanical system techniques were used for design and fabrication of microdischarge devices with a cavity width in 10 ∼ 50 μm diameter. The total emission from the cavity was measured to be 4.7 μW in a solid angle of 5 × 10-2.",

author = "Park, {Sung Jin} and Jack Chen and Chang Liu and Eden, {J. Gary}",

year = "2002",

month = jan,

day = "1",

language = "English (US)",

booktitle = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",

note = "Conference on Lasers and Electro-Optics (CLEO 2002) ; Conference date: 19-05-2002 Through 24-05-2002",

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TY - GEN

T1 - Microdischarge devices on the 10 ∼ 30 μm scale

T2 - Conference on Lasers and Electro-Optics (CLEO 2002)

AU - Park, Sung Jin

AU - Chen, Jack

AU - Liu, Chang

AU - Eden, J. Gary

PY - 2002/1/1

Y1 - 2002/1/1

N2 - Microdischarge device structures were designed to obtain cavity dimensions down to 10 μm. Microdrilling was performed through a metal/polymer/metal thin layered structure. Microelectromechanical system techniques were used for design and fabrication of microdischarge devices with a cavity width in 10 ∼ 50 μm diameter. The total emission from the cavity was measured to be 4.7 μW in a solid angle of 5 × 10-2.

AB - Microdischarge device structures were designed to obtain cavity dimensions down to 10 μm. Microdrilling was performed through a metal/polymer/metal thin layered structure. Microelectromechanical system techniques were used for design and fabrication of microdischarge devices with a cavity width in 10 ∼ 50 μm diameter. The total emission from the cavity was measured to be 4.7 μW in a solid angle of 5 × 10-2.

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UR - http://www.scopus.com/inward/citedby.url?scp=0036457347&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0036457347

BT - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Y2 - 19 May 2002 through 24 May 2002

ER -

Microdischarge devices on the 10 ∼ 30 μm scale: Fabrication and applications

Abstract

Other

ASJC Scopus subject areas

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