Microdischarge devices with 10 or 30 μm square silicon cathode cavities: Pd scaling and production of the XeO excimer

S. J. Park*, J. G. Eden, J. Chen, C. Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

37 Scopus citations

Fingerprint

Dive into the research topics of 'Microdischarge devices with 10 or 30 μm square silicon cathode cavities: Pd scaling and production of the XeO excimer'. Together they form a unique fingerprint.

Keyphrases

Earth and Planetary Sciences

Physics

Engineering

Material Science

Medicine and Dentistry