In this paper, we report the development of micromachining techniques for a biodegradable polymer for the first time. By virtue of their ability to naturally degrade in tissues, biodegradable polymers hold immense promise as new materials for implantable biomedical microdevices. This work focuses on the establishment of microfabrication processes for biodegradable microstructures and microdevices. Three unique fabrication processes have been established: (1) a micro-molding process to form 3D microstructures in polycaprolactone (PCL) via a silicon micromachined mold, (2) a method of transferring metal patterns to surfaces of PCL substrates, (3) techniques for sealing both dry and liquid-filled PCL micro-cavities with a metal thin film (e.g. gold). The chemical compatibility of PCL with common micromachining chemicals have been investigated.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering