Microlens arrays for optoelectronic devices

Francis Houlihan*, Madan Kunnavakham, Alex Liddle, Peter Mirau, Om Nalamasu, John Rogers

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

This paper reports on an improved method of fabricating microlens arrays using a low cost replication process. An accurate negative reproduction ("mold") of an existing high quality lens surface (master) is made in a soft silicone elastomer. This mold is formed by thermally curing Sylgard® 182 silicone elastomer (made by Dow Corning®) on the lens surface. To prevent distortion of the replica surface, the mold is made on a rigid backing plate. Dispensing a commercial epoxy 'Polyset' PCX 28-91B into the mold and curing it under UV radiation generates a replica lens array. The epoxy material is chosen to have minimal shrinkage upon curing. The epoxy material is also chosen to have lower intrinsic loss and have a refractive index tailored to the application. In addition, we have developed a procedure to enable the incorporation of commercially available SiO2 nanoparticles (Nissan IPA-ST-S, 9-11 nm) into this epoxy material. The incorporation of nanoparticles allows the epoxide to be harder, have a refractive index closer to SiO2, have even smaller shrinkage while maintaining low intrinsic loss because of the small size of the SiO2 particles.

Original languageEnglish (US)
Pages (from-to)497-515
Number of pages19
JournalJournal of Photopolymer Science and Technology
Volume15
Issue number3
DOIs
StatePublished - 2002

Keywords

  • MEM
  • Microlens array
  • Telecommunication

ASJC Scopus subject areas

  • Polymers and Plastics
  • Organic Chemistry
  • Materials Chemistry

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