Micromachined inking chip for scanning probe nanolithography using local thermal vapor inking method

Shifeng Li, Kashan A. Shaikh, Sandra Szegedi, Edgar Goluch, Chang Liu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Here the authors show a method for inking scanning probes based on local thermal evaporative inking transfer. This method results in low loss, rapid, and parallel inking action. Scanning probes are accommodated at openings of ink reservoirs. A resistive heater is used to initiate vaporization of inks to uniformly coat probes. 1 mM 16-mercaptohexadecanoic acid in ethanol solution is used to characterize this inking chip. Moreover, an array of scanning probes can be inked simultaneously using an array of inking reservoirs. During the inking process, each probe is tightly sealed inside individual reservoir so cross contamination is limited.

Original languageEnglish (US)
Article number173125
JournalApplied Physics Letters
Volume89
Issue number17
DOIs
StatePublished - 2006

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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