Micromachined magnetic actuator for active fluid control

Thomas Tsao*, Chang Liu, Yu Chong Tai, Chih Ming Ho

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

26 Scopus citations

Abstract

It is proposed that surface micromachined magnetic actuators (also known as magnetic flaps) can be used as an integral part of an active micro electro-mechanical fluid control system. Testing of the initial designs revealed problems that needed to be dealt with before the flaps could be efficiently used to control air flow. In this paper, we discuss the results obtained from the two generations of actuators that we have built so far.

Original languageEnglish (US)
Title of host publicationApplication of Microfabrication to Fluid Mechanics
PublisherASME
Pages31-38
Number of pages8
Volume197
StatePublished - Dec 1 1994
EventProceedings of the 1994 International Mechanical Engineering Congress and Exposition - Chicago, IL, USA
Duration: Nov 6 1994Nov 11 1994

Other

OtherProceedings of the 1994 International Mechanical Engineering Congress and Exposition
CityChicago, IL, USA
Period11/6/9411/11/94

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'Micromachined magnetic actuator for active fluid control'. Together they form a unique fingerprint.

Cite this